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新型元透鏡徹底改變了傳統(tǒng)的真空紫外光學技術(shù)

指南者留學 2022-06-15 12:24:11 閱讀量：1298

<div data-page-id="doxcnl5Xv9yOIYBCdE78cklTqCg" data-docx-has-block-data="true"> <div class="image-uploaded gallery old-record-id-doxcns4kGCm0MOoKuSwGUqQIPyf" style="text-align: justify;" data-type="image" data-ace-gallery-json="{"items":[{"uuid":"c0d36812-0da4-4eba-86bf-69bb12590ed6","height":1065,"width":1600,"currHeight":1065,"currWidth":1600,"natrualHeight":1065,"natrualWidth":1600,"pluginName":"imageUpload","scale":1,"src":"https%3A%2F%2Finternal-api-drive-stream.feishu.cn%2Fspace%2Fapi%2Fbox%2Fstream%2Fdownload%2Fall%2FboxcnPxeugEiEGzgtUOog3iax5u%2F%3Fmount_node_token%3Ddoxcns4kGCm0MOoKuSwGUqQIPyf%26mount_point%3Ddocx_image","file_token":"boxcnPxeugEiEGzgtUOog3iax5u","image_type":"image/png","size":2053845,"comments":[]}]}"> <div data-page-id="doxcnl5Xv9yOIYBCdE78cklTqCg" data-docx-has-block-data="true"> <div class="image-uploaded gallery old-record-id-doxcns4kGCm0MOoKuSwGUqQIPyf" style="text-align: center;" data-type="image" data-ace-gallery-json="{"items":[{"uuid":"8bfa8987-1ecf-4b03-b1c3-b1cfb0b3a3b1","height":1065,"width":1600,"currHeight":1065,"currWidth":1600,"natrualHeight":1065,"natrualWidth":1600,"pluginName":"imageUpload","scale":1,"src":"https%3A%2F%2Finternal-api-drive-stream.feishu.cn%2Fspace%2Fapi%2Fbox%2Fstream%2Fdownload%2Fall%2FboxcnPxeugEiEGzgtUOog3iax5u%2F%3Fmount_node_token%3Ddoxcns4kGCm0MOoKuSwGUqQIPyf%26mount_point%3Ddocx_image","file_token":"boxcnPxeugEiEGzgtUOog3iax5u","image_type":"image/png","size":2053845,"comments":[]}]}"><img src="https://info.compassedu.hk/sucai/content/1657534508529/1657534508529.png" width="807" height="537" /></div> </div> </div> <div class="ace-line ace-line old-record-id-doxcnmkySkskS2gu4kTctKEvz2e" style="text-align: center;"><span class="h6"><em>蔡丁炳教授（右）及陳木固博士。</em></span></div> <div class="ace-line ace-line old-record-id-doxcnmkySkskS2gu4kTctKEvz2e" style="text-align: justify;"> </div> <div class="ace-line ace-line old-record-id-doxcnemkyGA0McS2wiuUYu3Ccdd" style="text-align: justify;"><span class="p"><strong>由香港城市大學（城大）共同領(lǐng)導的一個研究小組成功開發(fā)出一種新型真空紫外（VUV）元透鏡，可以產(chǎn)生和聚焦VUV光，這是VUV光學市場的顛覆性技術(shù)。</strong></span></div> <div class="ace-line ace-line old-record-id-doxcnemkyGA0McS2wiuUYu3Ccdd" style="text-align: justify;"> </div> <div class="ace-line ace-line old-record-id-doxcn8kEIkIco6oeaq4mgOZLqRg" style="text-align: justify;"><span class="p">VUV用于半導體制造，光化學和材料科學。聚焦VUV光源是納米光刻，材料加工，先進制造和其他工業(yè)領(lǐng)域強烈需要的。</span></div> <div class="ace-line ace-line old-record-id-doxcn8kEIkIco6oeaq4mgOZLqRg" style="text-align: justify;"> </div> <div class="ace-line ace-line old-record-id-doxcnK60qiCYKqoSSwLxXh6bHQf" style="text-align: justify;"><span class="p">但是，使用起來成本很高。波長在100至200納米（nm）之間的VUV被空氣中的氧氣強烈吸收，需要真空室或其他專用環(huán)境。</span></div> <div class="ace-line ace-line old-record-id-doxcnK60qiCYKqoSSwLxXh6bHQf" style="text-align: justify;"> </div> <div class="ace-line ace-line old-record-id-doxcnK60qiCYKqoSSwLxXh6bHQf" style="text-align: justify;"><span class="p">傳統(tǒng)上，非常笨重和昂貴的系統(tǒng)具有特殊和稀有的非線性晶體用于產(chǎn)生和聚焦VUV光。</span></div> <div class="ace-line ace-line old-record-id-doxcnK60qiCYKqoSSwLxXh6bHQf" style="text-align: justify;"> </div> <div class="ace-line ace-line old-record-id-doxcnOmwAmkCeMQmwsRCw3yhnrc" style="text-align: justify;"><span class="p">此外，幾乎所有用于傳統(tǒng)鏡片的玻璃都不適合VUV，因為它們在該地區(qū)具有很強的吸收性。目前用于鏡片的少數(shù)VUV透射材料相對脆弱，對薄鏡片的制造和設(shè)計施加了實際限制。</span></div> <div class="ace-line ace-line old-record-id-doxcnOmwAmkCeMQmwsRCw3yhnrc" style="text-align: justify;"> </div> <div class="ace-line ace-line old-record-id-doxcnUSEoEgASuye2iLb1wjSeb7" style="text-align: justify;"><span class="p">電氣工程系（EE）講座教授<strong>蔡定平教授</strong>和EE研究助理教授<strong>陳木谷博士</strong>設(shè)計并制造了150納米長的三角形氧化鋅納米天線陣列，形成VUV元透鏡。</span></div> <div class="ace-line ace-line old-record-id-doxcnUSEoEgASuye2iLb1wjSeb7" style="text-align: justify;"> </div> <div class="ace-line ace-line old-record-id-doxcnaKAIy24UWog8qSmLcC2aRg" style="text-align: justify;"><span class="p">“我們開發(fā)了一種在氧化鋅薄膜上具有復雜納米結(jié)構(gòu)的元透鏡。它能夠轉(zhuǎn)換和聚焦VUV光。這種元透鏡為非線性VUV的產(chǎn)生和聚焦產(chǎn)生的光提供了一種緊湊的方法，“Tsai教授說，他是最近發(fā)表在<em>《科學進展》上的</em>論文的通訊作者之一，題為”<a href="https://www.science.org/doi/10.1126/sciadv.abn5644" target="_blank" rel="noopener">真空紫外線非線性超透鏡</a>”。</span></div> <div class="ace-line ace-line old-record-id-doxcnaKAIy24UWog8qSmLcC2aRg" style="text-align: justify;"> </div> <div class="ace-line ace-line old-record-id-doxcnKgSGGGq46CEOU1cBybAX1g" style="text-align: justify;"><span class="p">直徑為45微米的新型VUV元透鏡可以將394nm波長的UV光轉(zhuǎn)換為197nm波長的VUV光，并將VUV光聚焦在直徑小于200萬分之一米的小點上。在美國萊斯大學的測試中，一個聚焦的光點將功率密度提高了21倍。</span></div> <div class="ace-line ace-line old-record-id-doxcnKgSGGGq46CEOU1cBybAX1g" style="text-align: justify;"> </div> <div class="ace-line ace-line old-record-id-doxcneg2GiMyGQkkKSqd7DQ8Xlh" style="text-align: justify;"><span class="p">“我們的VUV元透鏡結(jié)構(gòu)緊湊，重量輕，效率高，可以通過半導體電子制造工藝批量生產(chǎn)。這種新穎而顛覆性的元器件可以徹底改變傳統(tǒng)的VUV光學技術(shù)及其市場，“蔡教授說。</span></div> <div class="ace-line ace-line old-record-id-doxcneg2GiMyGQkkKSqd7DQ8Xlh" style="text-align: justify;"> </div> <div class="ace-line ace-line old-record-id-doxcnqiee0iKOSmqcSl97f73SXS" style="text-align: justify;"><span class="p">元透鏡可以大大簡化VUV系統(tǒng)設(shè)計，并促進更先進的應(yīng)用。這項工作為開發(fā)低損耗VUV組件和提高VUV制度的可訪問性提供了一個有用的平臺。</span></div> <div class="ace-line ace-line old-record-id-doxcnqiee0iKOSmqcSl97f73SXS" style="text-align: justify;"> </div> <div class="ace-line ace-line old-record-id-doxcnwSsiEemiawA2KswZI3cVnh" style="text-align: justify;"><span class="p">本研究由香港特區(qū)政府大學教育資助委員會/研究資助局卓越領(lǐng)域計劃（AoE）資助。蔡教授是AoE項目“元光學，元聲學和元器件”的項目協(xié)調(diào)員。</span></div> <div class="ace-line ace-line old-record-id-doxcnwSsiEemiawA2KswZI3cVnh" style="text-align: justify;"> </div> <div class="ace-line ace-line old-record-id-doxcncoOIMMGuuGKY4Zrv5gICvf" style="text-align: justify;"><span class="p">該論文的共同作者包括美國萊斯大學的<strong>Naomi Halas教授，Peter Nordlander教授</strong>，<strong>Michael Semmlinger博士，Ming Zhang博士</strong>，<strong>Catherine Arndt博士，Benjamin Cerjan</strong>博士和<strong>Jan Yang博士</strong>;臺灣國立陽明交通大學<strong>曾明倫博士</strong>;臺灣中央研究院<strong>的黃子廷</strong>和<strong>朱成雄博士</strong>;國立臺灣大學<strong>郭信宇博士</strong>;和臺灣國立聯(lián)合大學的<strong>Vin-Cent Su博士</strong>。</span></div> <div class="image-uploaded gallery old-record-id-doxcn6sgm6oKuiSS20aSJNYUDwb" style="text-align: justify;" data-type="image" data-ace-gallery-json="{"items":[{"uuid":"1e7b2a88-2171-4104-87bf-07946c0f7bfe","height":900,"width":1600,"currHeight":900,"currWidth":1600,"natrualHeight":900,"natrualWidth":1600,"pluginName":"imageUpload","scale":1,"src":"https%3A%2F%2Finternal-api-drive-stream.feishu.cn%2Fspace%2Fapi%2Fbox%2Fstream%2Fdownload%2Fall%2FboxcnH33TatWPM1cjZPPbJZMQzf%2F%3Fmount_node_token%3Ddoxcn6sgm6oKuiSS20aSJNYUDwb%26mount_point%3Ddocx_image","file_token":"boxcnH33TatWPM1cjZPPbJZMQzf","image_type":"image/png","size":1288069,"comments":[]}]}"> <div data-page-id="doxcnl5Xv9yOIYBCdE78cklTqCg" data-docx-has-block-data="true"> <div class="image-uploaded gallery old-record-id-doxcn6sgm6oKuiSS20aSJNYUDwb" style="text-align: center;" data-type="image" data-ace-gallery-json="{"items":[{"uuid":"7010491a-731b-437e-a9d9-3e4a1ad831a4","height":900,"width":1600,"currHeight":900,"currWidth":1600,"natrualHeight":900,"natrualWidth":1600,"pluginName":"imageUpload","scale":1,"src":"https%3A%2F%2Finternal-api-drive-stream.feishu.cn%2Fspace%2Fapi%2Fbox%2Fstream%2Fdownload%2Fall%2FboxcnH33TatWPM1cjZPPbJZMQzf%2F%3Fmount_node_token%3Ddoxcn6sgm6oKuiSS20aSJNYUDwb%26mount_point%3Ddocx_image","file_token":"boxcnH33TatWPM1cjZPPbJZMQzf","image_type":"image/png","size":1288069,"comments":[]}]}"><img src="https://info.compassedu.hk/sucai/content/1657534501379/1657534501379.png" width="807" height="454" /></div> </div> </div> <div class="ace-line ace-line old-record-id-doxcn6WqGaI8qq4okemjexo6zlg" style="text-align: justify;"><span class="p"><em>新型元透鏡將394納米紫外線（藍色）轉(zhuǎn)換為197納米“真空紫外線”（粉紅色），并將VUV輸出聚焦在直徑小于200萬分之一米的小點上。微小的三角形納米諧振器，在氧化鋅（ZnO）的微觀圓盤上精確配置的同心圓中。圖中顯示了元透鏡的幾個掃描電子顯微鏡（SEM）圖像（右下角）。在SEM圖像中可以觀察到具有規(guī)則變化的旋轉(zhuǎn)角度的明確定義的納米三角形。</em></span></div> </div>

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